Atm Diffusion Furnaces

Triple stack 4" diameter tube Minibrute diffusion furnaces by Thermco, for use at atmospheric pressure and temperatures between 400 and 1150C (1200C for short times).

INSTRUCTIONS:

• Dry Oxide
• Wet Oxide
• BYU Oxide Thickness Color Calculator (archive color calculator)

Process gasses:

• Oxygen
• Water Vapor (bubbler)
• Nitrogen
• Argon
• Forming gas flow are available,

Flowmeter calibrated is for nitrogen; other gasses require a calculation.

For short time single wafer processing or if a rapid ramping of temperature up to 1200C is desired, a Rapid Thermal Anneal is more appropriate than a diffusion furnace run.