Processing Information and Safety Data
- Photolithography
- Photolithography Masks
- Thin Film Deposition Equipment and process notes
- Polishing
-
Etching
- Standard Stock Etch Chemical Concentrations
- commercial products for wet etching
- Wet Etch Rates table (Kirt Williams et.al., JMEMS V5, 1996)
- Etch Rates table2 (pdf) (Kirt Williams et.al., JMEMS 2003) (alternative link-local only)
- Summary of Metal Film Etching
- Anisotropic etch TMAH vs EDP vs Ethanolamine
- Surface Micromachining Release
- Diffusion and Implantation Oxide Growth
- Materials properties notes and MEMS Clearinghouse Database
- Processing Protocols (local Dartmouth access)
- New Processing Info (local Dartmouth access only).
- Stock Supplies (local Dartmouth access only).
- Lab Environmental Data (local Dartmouth access only).
-
LAB SAFETY (
Thayer Safety Page): Materials Safety Data Sheets (MSDS)
-
Complete Datrmouth MSDS database (requires Dartmouth Blitz authentication).
-
individual MSDS sheets or
merged MSDS file of materials used in this lab ONLY.
-
Laboratory Chemical Safety Summaries from
"Prudent Practices in the Laboratory: Handling and Disposal of Chemicals",
National Academy of Sciences, 1995.
(further
information)
-
Hazardous Chemical Backgrounders
from the Environmental Health Center (National Safety Council)
- ToxFAQs from the Agency for Toxic Substances and Disease Registry.
- Fisher Scientific has integrated a more complete MSDS database into their electronic catalog.
-
Cole Parmer
Chemical Resistance Database
- INCOMPATIBLE CHEMICALS ;a partial listing
-
-
Gowning and
Protective Equipment
-
Gowning Summary
- Frock (and Tyvek pants if legs are bare)
- Bouffant cap
- Shoe covers
- Nitrile Gloves (and Trionic gloves for acid or solvent work)
- Safety Glasses
NOTE: IF YOU WEAR CONTACT LENSES: you may not use this lab without written permission from the lab manager or the building safety officer.
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